JPH0324241U - - Google Patents
Info
- Publication number
- JPH0324241U JPH0324241U JP8431089U JP8431089U JPH0324241U JP H0324241 U JPH0324241 U JP H0324241U JP 8431089 U JP8431089 U JP 8431089U JP 8431089 U JP8431089 U JP 8431089U JP H0324241 U JPH0324241 U JP H0324241U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- plasma generation
- generation container
- protective cover
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8431089U JPH0324241U (en]) | 1989-07-17 | 1989-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8431089U JPH0324241U (en]) | 1989-07-17 | 1989-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0324241U true JPH0324241U (en]) | 1991-03-13 |
Family
ID=31632692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8431089U Pending JPH0324241U (en]) | 1989-07-17 | 1989-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0324241U (en]) |
-
1989
- 1989-07-17 JP JP8431089U patent/JPH0324241U/ja active Pending
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